Products
Products
Greene Tweed Seals
The semiconductor industry manufactures for example printed circuit boards and other components. The production emphasizes extreme cleanliness requirements and resistance to various chemicals.
Greene Tweed designs and manufactures components, materials and solutions that can function even in the most demanding environments. Greene Tweed offers products for environments where equipment failure is not an option with 160 years of experience. Greene Tweed's products are manufactured to withstand extreme temperatures, pressure, chemical corrosion and mechanical wear.
We offer high-quality seals, composites and connectors, especially for the semiconductor industry, where chemical resistance, cleanliness and temperature tolerance are critical.
Applications for these products include:
- ALD / CVD / etching / plasma process
- Silicon wafer processing equipment
- Processing chamber seals
- Cleanroom connections and wiring
- High-purity, low-particle emission environments
Products
Chemraz®
Chemraz® FFKM gaskets are available as O-rings, profile gaskets or customized to specified shape. Chemraz® replaces traditional Viton and Kalrez solutions in demanding applications.
- Fully fluorinated elastomers (FFKM)
- Excellent chemical and high temperature resistance
- Applications: CVD, ALD, etching, ashing, plasma processes
ONX® 600
ONX® 600 is intended for processing silicon wafers and is made of an electrically conductive composite.
- High-performance material for silicon wafer processing
- Resistant to static electricity and mechanical wear
- Cleanroom classified, no particle leakage
Seal-Connect®
Seal-Connect® is a connector solution for cleanrooms when only the best is acceptable.
- Fiber optic and electrical connectors for demanding environments
- ESD protection and tight construction
- Compatible with the standards of semiconductor devices
Other products
We also provide other Greene Tweed components and materials.
- Chemical and heat resistant Arlon® PEEK and Avalon® PTFE thermoplastics
- Xyfluor® – chemically inert and highly pure material
- Customized structural components for process chambers and equipment
Contact Us
Tell us your needs and we will contact you with a proposal as soon as possible! You can also request an presentation or suggest a meeting.
Active Vacuum Oy
- Kutomonkuja 2 D 2, 30100 Forssa
- Koskelantie 5 B, 4-krs, huone 417, 00610 Helsinki
- Business ID: 3446322-2